Microworld - Classification : Spécial for USJ junctions leakage measurements

Category : Spécial for USJ junctions leakage measurements

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8" special USJ Four-point-probe

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This configuration is specific for Ultra-Shallow-Junctions measurements
» Available on the following equipment :
» 280 serie (280SI and TCI)
» 233 serie for 8" wafer
» 333 serie for 8" to 12" wafer
», Mercury probe systems model CVRmap 3093A, model CVRmap 3093B, model M4PP3093
» PN junction leakage measurement (S/cm2)
» Contact resistivity measurement(Ohm-cm2)
» Picture shown as example