Calibration substrates for resistiity measurement systems

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The calibration substrates are provided with a certificate of calibration, they are NIST traceable, (National Institute of Standard and Technology / www.nist.gov ) » Availability : The "3" wafers are all available in the range listed in the downloadable document, for other dimensions please consult

"Automap software package", mapping & analysis of resistivity

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Software supplied with the 4-point probe systems model 280, 233, 333, 680. Not usable on other system Allows cartesian or polar maps with measurements up to more than 600 sites, full or partial wafer mapping, color 2D contour and 3D mapping and a number of set up and recipes. 1, 5, 9 points quick measurement arrays, diameter scans, and ASTM/SEMI X-patterns, customer specified measurement sites up to 5000 points, round or rectangular test patterns, thickness correction edge correction, temperature correction (optional) Measurement units: sheet resistance W/sq, resistivity W-cm, resistance V/I, thickness t(µ), thickness t(Å) easy unit conversion, librarian data storage p-n type detection, repeatability testing data export to ASCII files or Microsoft Excel remote data access via LAN diagnostics...