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Category :
A - CHARACTERIZATION BY C-V / I-V
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 | The configuration includes a probe station, a powerfull characterization system the K4200 and optional accessories (thermal chuck, dark box...)
» Will allow the characterization of the main components and materials (diode, transistor, photocell, high K...) with up to 8 chanels I/V, C/V and pulses
» The software operates thru windows allowing DDE, multi-tasking...
» Voltages ranges 1µv to 210V, current 0.1fA to 1A, libraries include HCI, CHC, Hall effect, Van Der Pauw...The CVU option includes also C-V, C-T and C-F
» Frequency range 10KHz to 10 MHz, capa range 1fF to 100nF
» The configuration is modular and can include : Thermally controlled chuck, illumination during measurements (photocell, CMOs cameras...), total isolation of the light with the dark box...
» Please consult with your application |
| |  | C(V) mercury automatic characterization tool for wafer & substrate
» Manual loading of the sample (optional robot), automatic positionning and measurement, mapping & 3 D results
» The software functions are divided in sections implementable in the field upon the growing applications
» The CVMap allows measuring & Charactérizing & monitoring a number of parameters on semiconductors materials including the process monitoring. |
| |  | Mercury automatic characterization tool for wafer & substrate including highly resistive substrates for wafer size 1" to 8"
» Manual loading of the sample & Automatic positioning and measurement, mapping & 3 D results
The 92B includes a 3 points contacts with ring-dot allowing measurements on SOI wafers through Pseudo MOS transistors formation
» Software functions divided in sections implementable in the field upon the growing applications
» The CVMap allows measuring & Charactérizing & monitoring a number of parameters on semiconductors materials including process and furnaces (contamination) monitoring. |
| |  | C(V) manual mercury characterization tool for wafer & substrate
» Manual loading of the sample, automatic measurement
» The CV92M allows measuring & Charactérizing & monitoring a number of parameters on semiconductors materials including the process monitoring. |
| |  | C(V) mercury automatic characterization tool for wafer & substrate up to 300mm
» Manual loading of the sample (optional robot), automatic positionning and measurement, mapping & 3 D results
» The software functions are divided in sections implementable in the field upon the growing applications
» The CVMap allows measuring & Charactérizing & monitoring a number of parameters on semiconductors materials including the process monitoring. |
| |  | Mercury automatic characterization tool for wafer & substrate up to 12" including highly resistive substrates
» Manual loading of the sample & Automatic positioning and measurement, mapping & 3 D results
The 3093B includes a 3 points contacts with ring-dot allowing measurements on SOI wafers through Pseudo MOS transistors formation
» Software functions divided in sections implementable in the field upon the growing applications
» The CVMap allows measuring & Charactérizing & monitoring a number of parameters on semiconductors materials including process and furnaces (contamination) monitoring. |
| |  | Automatic mercury 4 point probe AND characterization tool for wafer & substrate up to 12"
» Can measure and map sheet resistivity and leakage of USJ layers
» Manual loading of the sample (optional robot), automatic positioning and measurement, mapping & 3 D results
» Win OS allows multitasking and DDE links
» The software functions are divided in sections implementable in the field upon the growing applications
» The CVMap allows measuring & Charactérizing & monitoring a number of parameters on semiconductors materials including the process monitoring
» See also CVRmap 3093B and MPP43093 |
| |  | This automatic tool combines mercury 4 point probe AND C-V characterization tool for wafer & substrate up to 12" including highly resistive
» Manual loading of the sample (optional robot), automatic positioning and measurement, mapping & 3 D results
» The 3093B includes a 3 points contacts with ring-dot allowing measurements on SOI wafers through Pseudo MOS transistors structures
» The software functions are divided in sections mostly implementable in the field upon the growing applications
» The CVMap will measure & Characterize & monitor a number of parameters on semiconductors materials
» See also Voir aussi CVRmap 3093A et MPP43093 |
| |  | The CVMap probe systems beneficiate from sophisticated software packages that can be ordered upon the characterization applications needed
» The software packages (see the list in the references) fullfill specific applications and can be installed at time of ordering and later in the field.
» Each software package receive an assistance and support on solving measurements problems and set up measurements procedures for a period of one year. |
| Models |  Pack 1 : Dosage de faible dose implantées, EPI et wafers nus, Flat-band voltage, 3-section N-W plotting |
| Pack 2 : Oxide breakdown, trap density at interface, mobile ions, Tddb,-Qbd-Vox-Vbd, dielectric constant, pinhole density, I-V |
| Pack 3 : Generation lifetime at various depth of depletion, generation lifetime near surface |
|  Search limited to 3 Models / Product |
 | Range of accessories used within the CvMap mercury probe systems, Mercury dot contacts, simple, double with guarding or double guarding...
» The mercury contact concept from the bottom allows adapting large diameter mercury probes for specific applications (oxide breakdown or pseudo-mos...), contrary to the mercury arriving from the top
» See the range of probes in the the references
» Consult Microworld for any particular requirement. |
| Models | Option #9: Robot : Robot for automatic loading & Unloading of wafers, includes software |
| Search limited to 3 Models / Product |
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