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Category :
B - RESISTIVITY MEASUREMENT BY 4-POINT PROBE METHOD
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 | Manual sheet resistivity measurement systems for laboratory & R&D applications
» Manual sample positionning as well as the contact of the tips by a rotating lever
» A micro-switch insures that the current will be injected only after contact of the 4 needles
» The measurement itself is provided from an external sourcemeter and voltmeter typically Keithley family (supplied upon version)
» The system is modular including the measurement and display onto a PC
» The basic config is composed of a stand holding the 4 point probe head and a chuck of 4, 6 or 8 inches
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++ Theory & Complements see www.four-point-probe.eu |
| Models |  Pro44000N : Manual stand with Software, no pc, no K2400 |
| Pro44400N : Manual system with Soft & Keithley 2400, no pc |
| Pro4440N : Complete manual system with Soft & Keithley 2400 +PC |
|  Search limited to 3 Models / Product |
 | 1 milliohm to 8E11 ohm/square, manual (1pt, 5pts) or semi-automatic with analysis and mapping up to 6000 points upon model
» Standard measurements range & Optional extended range,
» Windows XP OS,
» Data storage and retrieval & powerfull search functions in the dataresults base
» Patterns of mapping polar or cartesian up to 650 points, diameter scan, custom patterns,
» Wafer edge correction,
» Automatic detection of current range and P/N
This range of sheet resistivity measurement systems will fullfill all needs in term on electrical sheet resistivity qualification, either in R&D and manual mode or in a production mode
++ See all 4PP models
++ Theory & Complements see www.four-point-probe.eu |
| Models | 280PI : Manual upgradable system |
| 280PCI : Manual system with a programming-keyboard |
| 280SI : Semi-automatic & Mapping |
| Search limited to 3 Models / Product |
 | The base config. is composed of a stand holding the probe head with a quick Z lever and a chuck for wafer of 4, 6 or 8 inches
» The sample positioning is manual as well as the contact of the tips by a rotating lever
» A micro-switch insures that the current will be injected only after contact of the 4-point probe head
» The measurement itself is provided from an external sourcemeter and voltmeter typically Keithley family, can be comprised in the proposal if requested
» The system can be upgraded to include the measurement and display onto a PC. See Pro44xx
» Perfect tool for for laboratories, universities, research centers...in the material characterization
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| Models | S302-x : Stand for resistivity measurement |
| |  | The 680 serie is composed of sheet resistivity semi-automatic measurement systems for compound III-V and other materials not measurable by classical 4 Point Probe systems
» 1 point, 5pts measurements or full mapping
» The sample loading is manual, however the measurement sequence and auto current ranging are automatic.
» The model 680I includes a pc control & software allowing mapping up a big number of sites with characterization and personnalization of the measurement programs
» Manual version available
» A dynamic AC waveform overcomes contact resistance problems typical in III-V compounds.
» Five point measurement available
» Measurement range 10 mOhm / square to 40 kOhm / square
++ See all 4PP models
++ Theory & Complements see www.four-point-probe.eu
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| Models | 680PI : 680 serie for III-V compound without PC |
| 680I : 680 serie for III-V compound with PC control |
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| |  | The MR1 system uses a special 4 contact probe to determine a sufficient electromagnetic compatibility of metal-coated plastic frame
» Preferrably the coat thickness is displayed but others parameters (actual resistance, square resistance) are possible
» Includes 14 pre-programmed material presets that can be selected for a direct measurement
» Measurable thickness 1µm to 100 µm
» Battery-operated with power supply connector
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++ Theory & Complements see www.four-point-probe.eu |
| |  | This hand-held resistivity system allow measurement on several materials and variable size. Supplied with battery powering, it can be used everywhere in the field
» 4 models/measurement ranges available with the adapted Cal fixture
» Inter-changeable four point probe head
» Applications : Conductivity/resistivity on large heavy coated panels, aircrafts paint, cars...Or quality control at suppliers site...
++ See the 4PP range
++ Theory & Complements see www.four-point-probe.eu |
| Search limited to 3 Models / Product |
 | High Resistivity Measurements system combining a dark box eliminating the disturbances due to magnetic radiations or light associated with the Keithley 2636 instrument
» Allows measurements at very low currents, in the Femto-Amperes range up to 1.5A and voltages from 1µV up to 200V
» The dark box is available in several sizes upon devices to measure
» Optional item : The temperature controller will allow the measures while heating up the device and/or performing T° stepping
» The electrical connections can be customized, triax or others
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++ Theory & Complements see www.four-point-probe.eu |
| |  | Measurement range 1 milliohm to 8E9 (8E11 optional) ohm/square, manual mode (1pt, 5pts) or semi-automatic with data analysis and mapping up to 6000 points
» Standard measurements range & Optional extended range,
» Windows XP OS,
» Data storage and retrieval & powerfull search functions in the dataresults base
» Patterns of mapping polar or cartesian up to 650 points, diameter scan, custom patterns,
» Wafer edge correction,
» Automatic detection of current range and P/N
++ See all 4PP models
++ Theory & Complements see www.four-point-probe.eu |
| |  | Low Resistivity Range Measurement system including the instruments Keithley 2611, 2182A and A four-point-probe stand
» The S302K-LRM allows resistivity measurements as low as 50 nohms/sq
» Internal built-in programs, no need of additional computer
» Measurements range 50 nohms/sq to 800 Kohms/sq
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++ Theory & Complements see www.four-point-probe.eu |
| |  | The calibration substrates are provided with a certificate of calibration, they are NIST traceable, (National Institute of Standard and Technology / www.nist.gov )
» Availability : The "3" wafers are all available in the range listed in the downloadable document, for other dimensions please consult |
| |  | Mercury 4 point probe particularly adapted for measuring sheet resistivity of USJ layers especially in case of USJ on highly doped background or extremely fragile layers.
The mercury probe allows a metal soft contact contrary to the classical 4 point probe by needles
» Non destructive probing & No pressure probing
» Highly repeatable contact area, very safe design principle
» Refreshed mercury before each contact insures clean contact and Clean and safe Mercury handling
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Mercury reservoir replacement only twice a year
» Up to 12" (300mm)
» See also CVRmap 3093A and CVRmap 3093B
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| |  | 4 point probe head for sheet resistivity measurements, usable on serie 280, 233, 333, 680 and on in-house mounting assembly, ambient use only, high temp models
» Tungsten or Osmium needles with adjustable pressure
» Standard pitch 1mm
» Tip radius of different sizes from 25µm to 500µm
» Termination by connector for direct plug in
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++ Theory & Complements see www.four-point-probe.eu |
| Models | 4PPH-cyl-N : Cylindrical probe head, Tungsten, 500 µm |
| 4PPH-cyl-C : Cylindrical probe head, Osmium, 100 µm |
| 4PPH-cyl-A : Cylindrical probe head, Tungsten, 25 µm |
| Search limited to 3 Models / Product |
 | Ambient or high Temperature (600°C) 4-point probe head, useable on Pro4 serie & Quadpro serie and in-house stand
» Needles material: Tungsten or Osmium
» Variety of spacing, tip materials and radius, needle pressure
» Termination with flying wires or Banana jacks or BNC or triax cables or connector
++ See all 4PP models
++ Theory & Complements see www.four-point-probe.eu |
| Models | SP440085TF(T) : 4PP head, Tungsten, 1mm, 127µm,85g, Termination to specify |
| SP450180TF(T) : 4PP head, Tungsten, 1,27mm, 127µm, 180g, Termination to specify |
| SP462085TF(T) : 4PP head, Tungsten, 1,6mm, 127µm, 85g, Termination to specify |
| Search limited to 3 Models / Product |
 | Resistivity measurement by a 4 point probe head associated to a probe station
This special micropositioner is placed onto the platen like a conventional micropositioner, it is specifically made for receiving a 4 point probe head of the semi-cylindrical» The X-Y-Z movement is independent and the coplanarity ajdustable
» A good solution when probe stations are available and not a specific resisitivity stand
»Available with magnetic or vacuum base
++ See probing stations for use |
| Models | S96MWVMS-4 : Micropositionner for 4 point probe head vacuum base |
| S96MWMMS-4 : Micropositionner for 4 point probe head magnetic base |
| |  | Software supplied with the 4-point probe systems model 280, 233, 333, 680. Not usable on other system
Allows cartesian or polar maps with measurements up to more than 600 sites, full or partial wafer mapping, color 2D contour and 3D mapping and a number of set up and recipes.
1, 5, 9 points quick measurement arrays, diameter scans, and ASTM/SEMI X-patterns, customer specified measurement sites up to 5000 points, round or rectangular test patterns, thickness correction
edge correction, temperature correction (optional)
Measurement units: sheet resistance W/sq, resistivity W-cm, resistance V/I, thickness t(µ), thickness t(Å)
easy unit conversion, librarian data storage
p-n type detection, repeatability testing
data export to ASCII files or Microsoft Excel
remote data access via LAN
diagnostics... |
| |  | Cassette to cassette or SMIF/FOUP version of 280 Series with small footprint, C2C handling without robot, edge defect tolerant, automatic wafer alignment
» 1 mOhm/square to 800 kOhm / square (optional extended range up to 8xE9 or 8xE11ohm/sq ), 6 and 8" wafer capability,
» Automap software package & SECS-II communication available
» Automatically measure 1 site or 5 sites conveniently and quickly without a computer. Edge exclusion 3 mm
electronic accuracy: < 0.1% (precision resistor)
push-button calibration, resolution: 16 bit A/D, compliance voltage 125 V
» Dual configuration switching and automatic edge correction
measurement calibration NIST/VLSI traceable
»: CE mark (European models only)
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| Models | 233AS : Automatic 4 point probe with SMIF opener |
| 233AC : Automatic 4 point probe with cassette |
| |  | Range of 12" (300mm) manual loading or cassette to cassette or SMIF/FOUP
» C2C handling without robot, edge defect tolerant automatic wafer alignment
» Measurement range 1 mOhm/square to 800 kOhm / square (extended range up to 8E11ohm/sq )
» Automap software package & SECS-II communication available
» Options : automatic switching of probe heads, camera system for wafer alignment...
» Edge exclusion 3 mm, electronic accuracy: < 0.1% (precision resistor)
» A range of 300mm systems reliable and easy for all production characterization and monitoring
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| Models | 333A : Automatic with manual loading |
| 333AC : Automatic with cassette 8 or 12" |
| 333AF : Automatic with FOUP loader environment |
| |  | Full automatic 4 point probe sheet resistivity measurement for LCD and large panels up to 1mand custom dimensions
» Measurement range 1 milliohm to 800 kohm/square (optional 8E11)
» Includes the positionning and receiving table, the mobile arm with a 4PP testhead, the control by PC and the measurements software with mapping and 3D graphs
» Allows to monitor the homogeneity of the sheet resistance through several available patterns
» Manual version available
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| Models | 1100SI : Automatic 4PP for LCD & Panels |
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