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Category :
Sheet resistivity 4 POINT-PROBE-SYSTEMS semiconductors range
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 | Manual sheet resistivity measurement systems for laboratory & R&D applications
» Manual sample positionning as well as the contact of the tips by a rotating lever
» A micro-switch insures that the current will be injected only after contact of the 4 needles
» The measurement itself is provided from an external sourcemeter and voltmeter typically Keithley family (supplied upon version)
» The system is modular including the measurement and display onto a PC
» The basic config is composed of a stand holding the 4 point probe head and a chuck of 4, 6 or 8 inches
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++ Theory & Complements see www.four-point-probe.eu |
| Models |  Pro44000N : Manual stand with Software, no pc, no K2400 |
| Pro44400N : Manual system with Soft & Keithley 2400, no pc |
| Pro4440N : Complete manual system with Soft & Keithley 2400 +PC |
|  Search limited to 3 Models / Product |
 | 1 milliohm to 8E11 ohm/square, manual (1pt, 5pts) or semi-automatic with analysis and mapping up to 6000 points upon model
» Standard measurements range & Optional extended range,
» Windows XP OS,
» Data storage and retrieval & powerfull search functions in the dataresults base
» Patterns of mapping polar or cartesian up to 650 points, diameter scan, custom patterns,
» Wafer edge correction,
» Automatic detection of current range and P/N
This range of sheet resistivity measurement systems will fullfill all needs in term on electrical sheet resistivity qualification, either in R&D and manual mode or in a production mode
++ See all 4PP models
++ Theory & Complements see www.four-point-probe.eu |
| Models | 280PI : Manual upgradable system |
| 280PCI : Manual system with a programming-keyboard |
| 280SI : Semi-automatic & Mapping |
| Search limited to 3 Models / Product |
 | The base config. is composed of a stand holding the probe head with a quick Z lever and a chuck for wafer of 4, 6 or 8 inches
» The sample positioning is manual as well as the contact of the tips by a rotating lever
» A micro-switch insures that the current will be injected only after contact of the 4-point probe head
» The measurement itself is provided from an external sourcemeter and voltmeter typically Keithley family, can be comprised in the proposal if requested
» The system can be upgraded to include the measurement and display onto a PC. See Pro44xx
» Perfect tool for for laboratories, universities, research centers...in the material characterization
++ See all 4PP models |
| Models | S302-x : Stand for resistivity measurement |
| |  | The 680 serie is composed of sheet resistivity semi-automatic measurement systems for compound III-V and other materials not measurable by classical 4 Point Probe systems
» 1 point, 5pts measurements or full mapping
» The sample loading is manual, however the measurement sequence and auto current ranging are automatic.
» The model 680I includes a pc control & software allowing mapping up a big number of sites with characterization and personnalization of the measurement programs
» Manual version available
» A dynamic AC waveform overcomes contact resistance problems typical in III-V compounds.
» Five point measurement available
» Measurement range 10 mOhm / square to 40 kOhm / square
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++ Theory & Complements see www.four-point-probe.eu
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| Models | 680PI : 680 serie for III-V compound without PC |
| 680I : 680 serie for III-V compound with PC control |
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| |  | Cassette to cassette or SMIF/FOUP version of 280 Series with small footprint, C2C handling without robot, edge defect tolerant, automatic wafer alignment
» 1 mOhm/square to 800 kOhm / square (optional extended range up to 8xE9 or 8xE11ohm/sq ), 6 and 8" wafer capability,
» Automap software package & SECS-II communication available
» Automatically measure 1 site or 5 sites conveniently and quickly without a computer. Edge exclusion 3 mm
electronic accuracy: < 0.1% (precision resistor)
push-button calibration, resolution: 16 bit A/D, compliance voltage 125 V
» Dual configuration switching and automatic edge correction
measurement calibration NIST/VLSI traceable
»: CE mark (European models only)
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| Models | 233AC : Automatic 4 point probe with cassette |
| 233AS : Automatic 4 point probe with SMIF opener |
| |  | Range of 12" (300mm) manual loading or cassette to cassette or SMIF/FOUP
» C2C handling without robot, edge defect tolerant automatic wafer alignment
» Measurement range 1 mOhm/square to 800 kOhm / square (extended range up to 8E11ohm/sq )
» Automap software package & SECS-II communication available
» Options : automatic switching of probe heads, camera system for wafer alignment...
» Edge exclusion 3 mm, electronic accuracy: < 0.1% (precision resistor)
» A range of 300mm systems reliable and easy for all production characterization and monitoring
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| Models | 333A : Automatic with manual loading |
| 333AC : Automatic with cassette 8 or 12" |
| 333AF : Automatic with FOUP loader environment |
| |  | Full automatic 4 point probe sheet resistivity measurement for LCD and large panels up to 1mand custom dimensions
» Measurement range 1 milliohm to 800 kohm/square (optional 8E11)
» Includes the positionning and receiving table, the mobile arm with a 4PP testhead, the control by PC and the measurements software with mapping and 3D graphs
» Allows to monitor the homogeneity of the sheet resistance through several available patterns
» Manual version available
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| Models | 1100SI : Automatic 4PP for LCD & Panels |
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