Mercury C-V system CVmap 92A serie

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C(V) mercury automatic characterization tool for wafer & substrate » Manual loading of the sample (optional robot), automatic positionning and measurement, mapping & 3 D results » The software functions are divided in sections implementable in the field upon the growing applications » The CVMap allows measuring & Charactérizing & monitoring a number of parameters on semiconductors materials including the process monitoring.

Mercury C-V system CVmap 92b serie

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Mercury automatic characterization tool for wafer & substrate including highly resistive substrates for wafer size 1" to 8" » Manual loading of the sample & Automatic positioning and measurement, mapping & 3 D results The 92B includes a 3 points contacts with ring-dot allowing measurements on SOI wafers through Pseudo MOS transistors formation » Software functions divided in sections implementable in the field upon the growing applications » The CVMap allows measuring & Charactérizing & monitoring a number of parameters on semiconductors materials including process and furnaces (contamination) monitoring.

Manual mercury C-V system CV92M

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C(V) manual mercury characterization tool for wafer & substrate » Manual loading of the sample, automatic measurement » The CV92M allows measuring & Charactérizing & monitoring a number of parameters on semiconductors materials including the process monitoring.

Mercury C-V system CVmap 3093A serie

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C(V) mercury automatic characterization tool for wafer & substrate up to 300mm » Manual loading of the sample (optional robot), automatic positionning and measurement, mapping & 3 D results » The software functions are divided in sections implementable in the field upon the growing applications » The CVMap allows measuring & Charactérizing & monitoring a number of parameters on semiconductors materials including the process monitoring.

Mercury C-V system CVmap 3093B serie

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Mercury automatic characterization tool for wafer & substrate up to 12" including highly resistive substrates » Manual loading of the sample & Automatic positioning and measurement, mapping & 3 D results The 3093B includes a 3 points contacts with ring-dot allowing measurements on SOI wafers through Pseudo MOS transistors formation » Software functions divided in sections implementable in the field upon the growing applications » The CVMap allows measuring & Charactérizing & monitoring a number of parameters on semiconductors materials including process and furnaces (contamination) monitoring.

CVRmap 3093A : Combines C-V & I-V & Four point probe

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Automatic mercury 4 point probe AND characterization tool for wafer & substrate up to 12" » Can measure and map sheet resistivity and leakage of USJ layers » Manual loading of the sample (optional robot), automatic positioning and measurement, mapping & 3 D results » Win OS allows multitasking and DDE links » The software functions are divided in sections implementable in the field upon the growing applications » The CVMap allows measuring & Charactérizing & monitoring a number of parameters on semiconductors materials including the process monitoring » See also CVRmap 3093B and MPP43093

CVRmap 3093B : Combines C-V & I-V & Four point probe

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This automatic tool combines mercury 4 point probe AND C-V characterization tool for wafer & substrate up to 12" including highly resistive » Manual loading of the sample (optional robot), automatic positioning and measurement, mapping & 3 D results » The 3093B includes a 3 points contacts with ring-dot allowing measurements on SOI wafers through Pseudo MOS transistors structures » The software functions are divided in sections mostly implementable in the field upon the growing applications » The CVMap will measure & Characterize & monitor a number of parameters on semiconductors materials » See also Voir aussi CVRmap 3093A et MPP43093