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Triaxial chuck for FemtoAmp measurements
4 - PROBING OF MICROSTRUCTURES
>
B - ACCESSORIES FOR PROBING APPLICATIONS
>
Miscellaneous other accessories
The triaxial chuck is composed of 3 parts of which the middle part can be polarized, available in 6-8-12 " version
» Will allow
ultra-low current measurement down to fA
when used with specific micropositioner with
trixial arm
and a
hermetic box for light and shield isolation
» A
high-temperature version
is also available when associated with a hot or tri-temp chuck
» The trixial chuck typically replaces the standard chuck onto a manual or semi-automatic prober to perform
low level current measurement
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