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CM2XX/3XX : Manual/semi-auto "submicronic" "Checkmate" Probers
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4 - PROBING OF MICROSTRUCTURES > A - PROBERS FOR ELECTRICAL ANALYSIS AND CHARACTERIZATION > General purpose probers (design, failure analysis, small production...)
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The Checkmate serie represents the state of the art for probing stations, either manual or semi-automatic » Available for probing on individual die or on wafers up to 8" or 12" This family of probe stations allows high performance for pads probing or internal lines manually or automatically » The stations are on-site upgradable from one version to another » Totally controllable by GPIB (semi-auto version) » A variety of options & accessories responds to all applications, which cold characterization (-65°C) and femtoamp measurement It's the ideal tool for design validation, failure analysis, small production testing(with manual loading of the wafer or die) + See the full DC range ++ See the RF&Microwave range
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| CM210 |
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| CM310 |
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| CM220 |
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| CM320 |
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| CM230 |
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| CM330 |
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| CM240 |
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| CM340 |
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| CM250 |
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| CM350 |
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Click on a reference to visualize (or not) the details
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 | CM210 (id :: 1544) | | Manual submicronic prober, 200mm |
| | General information | | Max wafer size | 8" |
| | Typical Applications | | 1st criteria of choice | 8" or 12", submicron, High accuracy & repeatability, for characterization & design validation, control "hands off" |
| | Notes | | Remarks | Upgradable to higher models |
| | Options & Accessories | | Other options & Accessories | DETAIL |
| | X-Y Stage | | Max travel | 200mm | | Resolution | Manual | | Repeatability | Manual | | Accuracy | Manual | | Travel speed | 5mm/0.5mm per turn | | Drive method | Coarse/Fine knobs in Y and Y |
| | "Z" Stage & Theta (rotation) | | "Z" Range | Contact/Separate | | Resolution | Pneumatic UP-DOWN | | Repeatability | 2 µm | | Rotation (Theta) | +/- 7.5 degrees | | Resolution | 0.35µm |
| | Chucks | | Plating | Au/Ni Plated Al |
| | Platen | | "Z" Range | 50mm with locking | | Drive method | 4 Points leadcrew | | Base material | Ni or Al |
| | Microscopy & Optics | | Max X travel | 50 mm | | Max Y travel | 50 mm | | Resolution | Manual | | Repeatability | Manual | | Accuracy | Manual | | "Z" Range | 100mm Pneumatic |
| | Facilities & Mechanical | | Weight | 91 kg | | Air | 2 CFM @ 30 PSI | | Vacuum | 15" Hg |
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 | CM310 (id :: 1545) | | Manual submicronic prober, 300mm |
| | General information | | Max wafer size | 12" |
| | Typical Applications | | 1st criteria of choice | 8" or 12", submicronic, High accuracy & repeatability, for characterization & design validation, control "hands off" |
| | Notes | | Remarks | Upgradable to higher models |
| | Options & Accessories | | Other options & Accessories | DETAIL |
| | X-Y Stage | | Max travel | 300mm | | Resolution | Manual | | Repeatability | Manual | | Accuracy | Manual | | Travel speed | 5mm/0.5mm per turn | | Drive method | Coarse/Fine knobs in Y and Y |
| | "Z" Stage & Theta (rotation) | | "Z" Range | Contact/Separate | | Resolution | Pneumatic UP-DOWN | | Repeatability | 2 µm | | Rotation (Theta) | +/- 7.5 degrees | | Resolution | 0.55µm |
| | Chucks | | Plating | Au/Ni Plated Al |
| | Platen | | "Z" Range | 50mm with locking | | Drive method | 4 Points leadcrew | | Base material | Ni or Al |
| | Microscopy & Optics | | Max X travel | 50 mm | | Max Y travel | 50 mm | | Resolution | Manual | | Repeatability | Manual | | Accuracy | Manual | | "Z" Range | 100mm Pneumatic |
| | Facilities & Mechanical | | Weight | 160 kg | | Air | 2 CFM @ 30 PSI | | Vacuum | 15" Hg |
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 | CM220 (id :: 1546) | | Manual submicronic motorized prober, 200mm |
| | General information | | Max wafer size | 8" |
| | Typical Applications | | 1st criteria of choice | 8" or 12", submicronic, High accuracy & repeatability, for characterization & design validation, control "hands off" |
| | Notes | | Remarks | Upgradable to higher models |
| | Options & Accessories | | Other options & Accessories | DETAIL |
| | X-Y Stage | | Max travel | 200mm | | Resolution | Motorized manual | | Repeatability | Motorized manual | | Accuracy | Motorized manual | | Travel speed | 20mm/s | | Drive method | DC motors, joystick |
| | "Z" Stage & Theta (rotation) | | "Z" Range | Contact/Separate | | Resolution | Pneumatic UP-DOWN | | Repeatability | 2 µm | | Rotation (Theta) | +/- 7.5 degrees | | Resolution | 0.35µm |
| | Chucks | | Plating | Au/Ni Plated Al |
| | Platen | | "Z" Range | 50mm with locking | | Drive method | 4 Points leadcrew | | Base material | Ni or Al |
| | Microscopy & Optics | | Max X travel | 50 mm | | Max Y travel | 50 mm | | Resolution | Motorized manual | | Repeatability | Motorized manual | | Accuracy | Motorized manual | | "Z" Range | 100mm Pneumatic |
| | Facilities & Mechanical | | Weight | 91 kg | | Air | 2 CFM @ 30 PSI | | Vacuum | 15" Hg |
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 | CM320 (id :: 1547) | | Manual submicronic motorized prober, 300mm |
| | General information | | Max wafer size | 12" |
| | Typical Applications | | 1st criteria of choice | 8" or 12", submicronic, High accuracy & repeatability, for characterization & design validation, control "hands off" |
| | Notes | | Remarks | Upgradable to higher models |
| | Options & Accessories | | Other options & Accessories | DETAIL |
| | X-Y Stage | | Max travel | 300mm | | Resolution | Motorized manual | | Repeatability | Motorized manual | | Accuracy | Motorized manual | | Travel speed | 5mm/0.5mm per turn | | Drive method | DC motors, joystick |
| | "Z" Stage & Theta (rotation) | | "Z" Range | Contact/Separate | | Resolution | Pneumatic UP-DOWN | | Repeatability | 2 µm | | Rotation (Theta) | +/- 7.5 degrees | | Resolution | 0.55µm |
| | Chucks | | Plating | Au/Ni Plated Al |
| | Platen | | "Z" Range | 50mm with locking | | Drive method | 4 Points leadcrew | | Base material | Ni or Al |
| | Microscopy & Optics | | Max X travel | 50 mm | | Max Y travel | 50 mm | | Resolution | Motorized manual | | Repeatability | Motorized manual | | Accuracy | Motorized manual | | "Z" Range | 100mm Pneumatic |
| | Facilities & Mechanical | | Weight | 160 kg | | Air | 2 CFM @ 30 PSI | | Vacuum | 15" Hg |
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 | CM230 (id :: 1548) | | Motorized submicronic prober, 200mm |
| | General information | | Max wafer size | 8" |
| | Typical Applications | | 1st criteria of choice | 8" or 12", submicronic, High accuracy & repeatability, for characterization & design validation, control "hands off" |
| | Notes | | Remarks | Includes jostick and precision dials for X-Y platen and microscope, Upgradable to higher models |
| | Options & Accessories | | Other options & Accessories | DETAIL |
| | X-Y Stage | | Max travel | 200mm | | Resolution | 0.1µm | | Repeatability | 1µm | | Accuracy | 3µm | | Travel speed | 50mm/s | | Drive method | DC motors, encoded |
| | "Z" Stage & Theta (rotation) | | "Z" Range | Contact/Separate | | Resolution | Pneumatic UP-DOWN | | Repeatability | 2 µm | | Rotation (Theta) | +/- 7.5 degrees | | Resolution | 0.35µm |
| | Chucks | | Plating | Au/Ni Plated Al |
| | Platen | | "Z" Range | 50mm with locking | | Drive method | 4 Points leadcrew | | Base material | Ni or Al |
| | Microscopy & Optics | | Max X travel | 50 mm | | Max Y travel | 50 mm | | Resolution | 0.1µm | | Repeatability | 2µm | | Accuracy | 10µm | | "Z" Range | 100mm Pneumatic |
| | Facilities & Mechanical | | Weight | 91 kg | | Air | 2 CFM @ 30 PSI | | Vacuum | 15" Hg |
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 | CM330 (id :: 1549) | | Motorized submicronic prober, 300mm |
| | General information | | Max wafer size | 12" |
| | Typical Applications | | 1st criteria of choice | 8" or 12", submicronic, High accuracy & repeatability, for characterization & design validation, control "hands off" |
| | Notes | | Remarks | Includes jostick and precision dials for X-Y platen and microscope, Upgradable to higher models |
| | Options & Accessories | | Other options & Accessories | DETAIL |
| | X-Y Stage | | Max travel | 300mm | | Resolution | 0.1µm | | Repeatability | 1µm | | Accuracy | 3µm | | Travel speed | 50mm/s | | Drive method | DC motors, encoded |
| | "Z" Stage & Theta (rotation) | | "Z" Range | Contact/Separate | | Resolution | Pneumatic UP-DOWN | | Repeatability | 2 µm | | Rotation (Theta) | +/- 7.5 degrees | | Resolution | 0.55µm |
| | Chucks | | Plating | Au/Ni Plated Al |
| | Platen | | "Z" Range | 50mm with locking | | Drive method | 4 Points leadcrew | | Base material | Ni or Al |
| | Microscopy & Optics | | Max X travel | 50 mm | | Max Y travel | 50 mm | | Resolution | 0.1µm | | Repeatability | 2µm | | Accuracy | 10µm | | "Z" Range | 100mm Pneumatic |
| | Facilities & Mechanical | | Weight | 160 kg | | Air | 2 CFM @ 30 PSI | | Vacuum | 15" Hg |
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 | CM240 (id :: 1550) | | Programmable motorized submicronic prober, 200mm |
| | General information | | Max wafer size | 8" |
| | Typical Applications | | 1st criteria of choice | 8" or 12", submicronic, High accuracy & repeatability, for characterization & design validation, control "hands off" |
| | Notes | | Remarks | Includes PC and pragramming capabilities for microscope and 4 CAPs probes, upgradable to higher model semi-automatic |
| | Options & Accessories | | Other options & Accessories | DETAIL |
| | X-Y Stage | | Max travel | 200mm | | Resolution | 0.1µm | | Repeatability | 1µm | | Accuracy | 3µm | | Travel speed | 50mm/s | | Drive method | AC servo motors |
| | "Z" Stage & Theta (rotation) | | "Z" Range | 9.5mm | | Resolution | 0.06µm | | Repeatability | 0.1µm | | Rotation (Theta) | +/- 6 degrees | | Resolution | 0.055µm |
| | Chucks | | Plating | Au/Ni Plated Al |
| | Platen | | "Z" Range | 50mm with locking | | Drive method | 4 Points leadcrew | | Base material | Ni or Al |
| | Microscopy & Optics | | Max X travel | 50 mm | | Max Y travel | 50 mm | | Resolution | 0.1µm | | Repeatability | 2µm | | Accuracy | 10µm | | "Z" Range | 100mm Pneumatic |
| | Facilities & Mechanical | | Weight | 91 kg | | Air | 2 CFM @ 30 PSI | | Vacuum | 15" Hg |
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 | CM340 (id :: 1551) | | Programmable motorized submicronic prober, 300mm |
| | General information | | Max wafer size | 12" |
| | Typical Applications | | 1st criteria of choice | 8" or 12", submicronic, High accuracy & repeatability, for characterization & design validation, control "hands off" |
| | Notes | | Remarks | Includes PC and pragramming capabilities for microscope and 4 CAPs probes, upgradable to higher model semi-automatic |
| | Options & Accessories | | Other options & Accessories | DETAIL |
| | X-Y Stage | | Max travel | 300mm | | Resolution | 0.1µm | | Repeatability | 1µm | | Accuracy | 3µm | | Travel speed | 50mm/s | | Drive method | AC servo motors |
| | "Z" Stage & Theta (rotation) | | "Z" Range | 9.5mm | | Resolution | 0.06µm | | Repeatability | 0.1µm | | Rotation (Theta) | +/- 6 degrees | | Resolution | 0.075µm |
| | Chucks | | Plating | Au/Ni Plated Al |
| | Platen | | "Z" Range | 50mm with locking | | Drive method | 4 Points leadcrew | | Base material | Ni or Al |
| | Microscopy & Optics | | Max X travel | 50 mm | | Max Y travel | 50 mm | | Resolution | 0.1µm | | Repeatability | 2µm | | Accuracy | 10µm | | "Z" Range | 100mm Pneumatic |
| | Facilities & Mechanical | | Weight | 160 kg | | Air | 2 CFM @ 30 PSI | | Vacuum | 15" Hg |
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 | CM250 (id :: 1552) | | Semi-automatic prober, 200mm |
| | General information | | Max wafer size | 8" |
| | Typical Applications | | 1st criteria of choice | 8" or 12", submicronic, High accuracy & repeatability, for characterization & design validation, control "hands off" |
| | Notes | | Remarks | Semi-automatic with PC and programming capabilities for Y-Y table, microscope and 4 CAPs probes, upgradable to higher model semi-automatic |
| | Options & Accessories | | Other options & Accessories | DETAIL |
| | X-Y Stage | | Max travel | 200mm | | Resolution | 0.1µm | | Repeatability | 1µm | | Accuracy | 3µm | | Travel speed | 50mm/s | | Drive method | AC servo motors |
| | "Z" Stage & Theta (rotation) | | "Z" Range | 9.5mm | | Resolution | 0.06µm | | Repeatability | 0.1µm | | Rotation (Theta) | +/- 6 degrees | | Resolution | 0,055µm |
| | Chucks | | Plating | Au/Ni Plated Al |
| | Platen | | "Z" Range | 50mm with locking | | Drive method | 4 Points leadcrew | | Base material | Ni or Al |
| | Microscopy & Optics | | Max X travel | 50 mm | | Max Y travel | 50 mm | | Resolution | 0.1µm | | Repeatability | 2µm | | Accuracy | 10µm | | "Z" Range | 100mm Pneumatic |
| | Facilities & Mechanical | | Weight | 91 kg | | Air | 2 CFM @ 30 PSI | | Vacuum | 15" Hg |
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 | CM350 (id :: 1553) | | Semi-automatic prober, 300mm |
| | General information | | Max wafer size | 12" |
| | Typical Applications | | 1st criteria of choice | 8" or 12", submicronic, High accuracy & repeatability, for characterization & design validation, control "hands off" |
| | Notes | | Remarks | Semi-automatic with PC and programming capabilities for Y-Y table, microscope and 4 CAPs probes, upgradable to higher model semi-automatic |
| | Options & Accessories | | Other options & Accessories | DETAIL |
| | X-Y Stage | | Max travel | 300mm | | Resolution | 0.1µm | | Repeatability | 1µm | | Accuracy | 3µm | | Travel speed | 50mm/s | | Drive method | AC servo motors |
| | "Z" Stage & Theta (rotation) | | "Z" Range | 9.5mm | | Resolution | 0.06µm | | Repeatability | 0.1µm | | Rotation (Theta) | +/- 6 degrees | | Resolution | 0.075µm |
| | Chucks | | Plating | Au/Ni Plated Al |
| | Platen | | "Z" Range | 50mm with locking | | Drive method | 4 Points leadcrew | | Base material | Ni or Al |
| | Microscopy & Optics | | Max X travel | 50 mm | | Max Y travel | 50 mm | | Resolution | 0.1µm | | Repeatability | 2µm | | Accuracy | 10µm | | "Z" Range | 100mm Pneumatic |
| | Facilities & Mechanical | | Weight | 160 kg | | Air | 2 CFM @ 30 PSI | | Vacuum | 15" Hg |
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