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S1160 : Manual "low cost" prober serie
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4 - PROBING OF MICROSTRUCTURES > A - PROBERS FOR ELECTRICAL ANALYSIS AND CHARACTERIZATION > General purpose probers (design, failure analysis, small production...)
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The S1160 is a "Low cost"manual probing station for multi-applications with high stability.
» Configurable upon needs & Upgradable to bigger diameter from 4" up to 8"
» For wafers & Substrates from 10 to 200mm
» Accepts high performance microscope or stereozoom (binocular)
» Up to 10 micropositionners
» Options such as thermal chuck, probecard fixture, triaxial Femtoamp chuck, dark box...
A RF/MICROWAVE version is available see WL1160
+ See the full DC range
++ See the RF&Microwave range
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| S1160A4N |
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| S1160B4N |
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| S1160A6N |
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| S1160B6N |
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| S1160A8N |
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| S1160B8N |
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Click on a reference to visualize (or not) the details
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 | S1160A4N (id :: 1538) | | Manual prober up to 4" & Mounting "High power" microscope |
| | General information | | Max wafer size | 4" |
| | Typical Applications | | 1st criteria of choice | Economical, evolutive up to 8", accessories, micron positionning, research labs, univ. schools... |
| | Notes | | Remarks | "High power" Microscope mount (Mitutoyo, Azoom...) |
| | Options & Accessories | | Other options & Accessories | DETAIL |
| | X-Y Stage | | Max travel | 100mm | | Resolution | Manual | | Repeatability | Manual | | Accuracy | Manual | | Travel speed | X-29mm/turn, Y-40mm/turn | | Drive method | Rack & pinion gear |
| | "Z" Stage & Theta (rotation) | | "Z" Range | Fixed | | Resolution | N/A | | Repeatability | N/A | | Rotation (Theta) | 360° with optional rotation lock | | Resolution | Manual |
| | Chucks | | Plating | Aluminium, Nickel, Gold |
| | Platen | | "Z" Range | 9.5mm coarse with friction stop + 33mm fine | | Drive method | Lever + belt | | Base material | Steel, alu optional |
| | Microscopy & Optics | | Max X travel | 50 mm | | Max Y travel | 45 mm | | Resolution | Manual | | Repeatability | Manual | | Accuracy | Manual | | "Z" Range | Chuck fixed |
| | Facilities & Mechanical | | Weight | 60 Kg | | Air | No | | Vacuum | 20" Hg @.1 CFM |
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| S1160B4N (id :: 2394) | | Manual prober up to 4" & Binocular microscope mounting |
| | General information | | Max wafer size | 4" |
| | Typical Applications | | 1st criteria of choice | Economical, evolutive up to 8", accessories, micron positionning, research labs, univ. schools... |
| | Notes | | Remarks | Binocular "Stereozoom" Microscope mount (Olympus, Motic, Leica...) |
| | Options & Accessories | | Other options & Accessories | DETAIL |
| | X-Y Stage | | Max travel | 100mm | | Resolution | Manual | | Repeatability | Manual | | Accuracy | Manual | | Travel speed | X-29mm/turn, Y-40mm/turn | | Drive method | Rack & pinion gear |
| | "Z" Stage & Theta (rotation) | | "Z" Range | Fixed | | Resolution | N/A | | Repeatability | N/A | | Rotation (Theta) | 360° with optional rotation lock | | Resolution | Manual |
| | Chucks | | Plating | Aluminium, Nickel, Gold |
| | Platen | | "Z" Range | 9.5mm coarse with friction stop + 33mm fine | | Drive method | Lever + belt | | Base material | Steel, alu optional |
| | Microscopy & Optics | | Max X travel | 50 mm | | Max Y travel | 45 mm | | Resolution | Manual | | Repeatability | Manual | | Accuracy | Manual | | "Z" Range | Chuck fixed |
| | Facilities & Mechanical | | Weight | 60 Kg | | Air | No | | Vacuum | 20" Hg @.1 CFM |
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| S1160A6N (id :: 2391) | | Manual prober up to 6" & Mounting "High power" microscope |
| | General information | | Max wafer size | 6" |
| | Typical Applications | | 1st criteria of choice | Economical, evolutive up to 8", accessories, micron positionning, research labs, univ. schools... |
| | Notes | | Remarks | "High power" Microscope mount (Mitutoyo, Azoom...) |
| | Options & Accessories | | Other options & Accessories | DETAIL |
| | X-Y Stage | | Max travel | 150mm | | Resolution | Manual | | Repeatability | Manual | | Accuracy | Manual | | Travel speed | X-29mm/turn, Y-40mm/turn | | Drive method | Rack & pinion gear |
| | "Z" Stage & Theta (rotation) | | "Z" Range | Fixed | | Resolution | N/A | | Repeatability | N/A | | Rotation (Theta) | 360° with optional rotation lock | | Resolution | Manual |
| | Chucks | | Plating | Aluminium, Nickel, Gold |
| | Platen | | "Z" Range | 9.5mm coarse with friction stop + 33mm fine | | Drive method | Lever + belt | | Base material | Steel, alu optional |
| | Microscopy & Optics | | Max X travel | 50 mm | | Max Y travel | 45 mm | | Resolution | Manual | | Repeatability | Manual | | Accuracy | Manual | | "Z" Range | Chuck fixed |
| | Facilities & Mechanical | | Weight | 60 Kg | | Air | No | | Vacuum | 20" Hg @.1 CFM |
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| S1160B6N (id :: 2396) | | Manual prober up to 6" & Binocular microscope mounting |
| | General information | | Max wafer size | 6" |
| | Typical Applications | | 1st criteria of choice | Economical, evolutive up to 8", accessories, micron positionning, research labs, univ. schools... |
| | Notes | | Remarks | Binocular "Stereozoom" Microscope mount (Olympus, Motic, Leica...) |
| | Options & Accessories | | Other options & Accessories | DETAIL |
| | X-Y Stage | | Max travel | 150mm | | Resolution | Manual | | Repeatability | Manual | | Accuracy | Manual | | Travel speed | X-29mm/turn, Y-40mm/turn | | Drive method | Rack & pinion gear |
| | "Z" Stage & Theta (rotation) | | "Z" Range | Fixed | | Resolution | N/A | | Repeatability | N/A | | Rotation (Theta) | 360° with optional rotation lock | | Resolution | Manual |
| | Chucks | | Plating | Aluminium, Nickel, Gold |
| | Platen | | "Z" Range | 9.5mm coarse with friction + 33mm fine | | Drive method | Lever + belt | | Base material | Steel, alu optional |
| | Microscopy & Optics | | Max X travel | 50 mm | | Max Y travel | 45 mm | | Resolution | Manual | | Repeatability | Manual | | Accuracy | Manual | | "Z" Range | Chuck fixed |
| | Facilities & Mechanical | | Weight | 60 Kg | | Air | No | | Vacuum | 20" Hg @.1 CFM |
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| S1160A8N (id :: 2392) | | Manual prober up to 8" & Mounting "High power" microscope |
| | General information | | Max wafer size | 8" |
| | Typical Applications | | 1st criteria of choice | Economical, evolutive up to 8", accessories, micron positionning, research labs, univ. schools... |
| | Notes | | Remarks | "High power" Microscope mount (Mitutoyo, Azoom...) |
| | Options & Accessories | | Other options & Accessories | DETAIL |
| | X-Y Stage | | Max travel | 200mm | | Resolution | Manual | | Repeatability | Manual | | Accuracy | Manual | | Travel speed | X-29mm/turn, Y-40mm/turn | | Drive method | Rack & pinion gear |
| | "Z" Stage & Theta (rotation) | | "Z" Range | Fixed | | Resolution | N/A | | Repeatability | N/A | | Rotation (Theta) | 360° with optional rotation lock | | Resolution | Manual |
| | Chucks | | Plating | Aluminium, Nickel, Gold |
| | Platen | | "Z" Range | 9.5mm coarse with friction stop + 33mm fine | | Drive method | Lever + belt | | Base material | Steel, alu optional |
| | Microscopy & Optics | | Max X travel | 50 mm | | Max Y travel | 45 mm | | Resolution | Manual | | Repeatability | Manual | | Accuracy | Manual | | "Z" Range | Chuck fixed |
| | Facilities & Mechanical | | Weight | 60 Kg | | Air | No | | Vacuum | 20" Hg @.1 CFM |
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| S1160B8N (id :: 2397) | | Manual prober up to 8" & Binocular microscope mounting |
| | General information | | Max wafer size | 8" |
| | Typical Applications | | 1st criteria of choice | Economical, evolutive up to 8", accessories, micron positionning, research labs, univ. schools... |
| | Notes | | Remarks | Binocular "Stereozoom" Microscope mount (Olympus, Motic, Leica...) |
| | Options & Accessories | | Other options & Accessories | DETAIL |
| | X-Y Stage | | Max travel | 200mm | | Resolution | Manual | | Repeatability | Manual | | Accuracy | Manual | | Travel speed | X-29mm/turn, Y-40mm/turn | | Drive method | Rack & pinion gear |
| | "Z" Stage & Theta (rotation) | | "Z" Range | Fixed | | Resolution | N/A | | Repeatability | N/A | | Rotation (Theta) | 360° with optional rotation lock | | Resolution | Manual |
| | Chucks | | Plating | Aluminium, Nickel, Gold |
| | Platen | | "Z" Range | 9.5mm coarse with friction stop + 33mm fine | | Drive method | Lever + belt | | Base material | Steel, alu optional |
| | Microscopy & Optics | | Max X travel | 50 mm | | Max Y travel | 45 mm | | Resolution | Manual | | Repeatability | Manual | | Accuracy | Manual | | "Z" Range | Chuck fixed |
| | Facilities & Mechanical | | Weight | 60 Kg | | Air | No | | Vacuum | 20" Hg @.1 CFM |
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No Product models
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