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Semi-automatic & manual 4PP up to 200mm
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1 - ELECTRICAL CHARACTERIZATION OF SEMICONDUCTIVE LAYERS > B - RESISTIVITY MEASUREMENT BY 4-POINT PROBE METHOD > Sheet resistivity 4 POINT-PROBE-SYSTEMS semiconductors range
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1 milliohm to 8E11 ohm/square, manual (1pt, 5pts) or semi-automatic with analysis and mapping up to 6000 points upon model
» Standard measurements range & Optional extended range,
» Windows XP OS,
» Data storage and retrieval & powerfull search functions in the dataresults base
» Patterns of mapping polar or cartesian up to 650 points, diameter scan, custom patterns,
» Wafer edge correction,
» Automatic detection of current range and P/N
This range of sheet resistivity measurement systems will fullfill all needs in term on electrical sheet resistivity qualification, either in R&D and manual mode or in a production mode
++ See all 4PP models
++ Theory & Complements see www.four-point-probe.eu
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Request more information by clicking on
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See all Product Models by clicking the corresponding tab.
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| | Technical information | | Measurement range | 1 milliohm to 800Kohm/square, up to 8E11 optional |
| Types of wafers & Substrates acceptable | 3-8" with mapping, few mm min in manual |
| Repeatability | 0,2% typical |
| Data transfer | RS232, SECSII optional |
| Number of measurements (site) point | Up to 650 |
| Measurements units | Ohm/square, Ohm-cm, V/I, t(µm), T(Angstroms) |
| | Typical Applications |
| Product DataSheet (pdf) | Clic here to download |
| 1st criteria of choice | Complete, =<200mm, upgradable |
| Measure | Sheet resistivity & Thickness |
| Monitor | Homogeneity, reproductibiliy |
| Characterize | All thin layers conductive or semiconductive |
| | Facilities & Mechanical | | Dimensions | H76xW51xD76cm + PC-monitor-keyboard |
| Vacuum | 20" Hg |
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No detailed Informations
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| 280PI |
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| 280PCI |
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| 280SI |
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| 280TCI |
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| 280DI |
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Click on a reference to visualize (or not) the details
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 | 280PI (id :: 172) | | Manual upgradable system |
| | Technical information | | Measurement range | 1 milliohm to 800Kohm/square | | Mapping patterns | 1pt, 5 pt + manual | | Measurements units | Ohm/square | | Operating system (OS) | Proprietary |
| | Typical Applications | | Product DataSheet (pdf) | Clic here to download | | Measure | Sheet resistivity | | Monitor | Homogeneity, reproductibiliy | | Characterize | All thin layers conductive or semiconductive |
| | Options & Accessories | | Analysis capabilities | Mean & std deviation on 5 sites |
| | Software & Associated | | Measurements & analysis software | No |
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| 280PCI (id :: 173) | | Manual system with a programming-keyboard |
| | Technical information | | Measurement range | 1 milliohm to 800Kohm/square | | Mapping patterns | 1 pt, 5 pt + manual | | Measurements units | Ohm/square, Ohm-cm, V/I, std deviation | | Operating system (OS) | Propriétary |
| | Typical Applications | | Product DataSheet (pdf) | Clic here to download | | Measure | Sheet resistivity | | Monitor | Homogeneity, reproductibiliy | | Characterize | All thin layers conductive or semiconductive |
| | Options & Accessories | | Analysis capabilities | Mean Std deviation + 15 prog stored |
| | Software & Associated | | Measurements & analysis software | No |
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| 280SI (id :: 174) | | Semi-automatic & Mapping |
| | Technical information | | Measurement range | 1 milliohm to 800Kohm/square | | Mapping patterns | Polar, rectangular, custom, quick check 1 pt, 5 pts | | Measurements units | Ohm/square, Ohm-cm, V/I, t(µm), T(Angstroms) | | Operating system (OS) | Windows |
| | Typical Applications | | Product DataSheet (pdf) | Clic here to download | | Measure | Sheet resistivity & Thickness | | Monitor | Homogeneity, reproductibiliy | | Characterize | All thin layers conductive or semiconductive |
| | Options & Accessories | | Analysis capabilities | Yes |
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| 280TCI (id :: 175) | | Semi-automatic & mapping & Temperature compensation |
| | Technical information | | Measurement range | 1 milliohm to 800Kohm/square, up to 8E11 optional | | Mapping patterns | N/A | | Measurements units | Ohm/square, Ohm-cm, V/I, t(µm), T(Angstroms) | | Operating system (OS) | N/A |
| | Typical Applications | | Product DataSheet (pdf) | Clic here to download | | Measure | Sheet resistivity & Thickness | | Monitor | Homogeneity, reproductibiliy | | Characterize | All thin layers conductive or semiconductive |
| | Options & Accessories | | Analysis capabilities | N/A |
| | Software & Associated | | Measurements & analysis software | Yes |
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| 280DI (id :: 176) | | Semi-automatic & Mapping & Extended range |
| | Technical information | | Measurement range | 1 milliohm to 8E9 ohm/square, up to 8E11 optional | | Mapping patterns | Rectangular, polar, custom, partial... | | Measurements units | Ohm/square, Ohm-cm, V/I, t(µm), T(Angstroms) | | Operating system (OS) | WINXP |
| | Typical Applications | | Product DataSheet (pdf) | Clic here to download | | Measure | Sheet resistivity & Thickness | | Monitor | Homogeneity, reproductibiliy | | Characterize | All thin layers conductive or semiconductive |
| | Options & Accessories | | Analysis capabilities | Yes |
| | Software & Associated | | Measurements & analysis software | Yes |
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No Product models
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